Ferroelectric thin films for micro-sensors and actuators: a review
نویسنده
چکیده
This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1−xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
منابع مشابه
Micro Fabrication Technology of Ferroelectric Film and its Application to MEMS
Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...
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